Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2011-06-14
2011-06-14
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C318S611000, C318S568170, C356S622000, C356S603000, C355S072000, C355S077000, C355S053000
Reexamination Certificate
active
07961309
ABSTRACT:
A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table, a sensor, a displacement system, a balance mass, and a bearing. The substrate table is constructed and arranged to hold the substrate. The sensor is constructed and arranged to measure a parameter of the substrate. The displacement system is configured to displace the substrate table or the sensor with respect to the other in a first direction. The bearing is configured to movably support the first balance mass so as to be substantially free to translate in a direction opposite of the first direction in order to counteract a displacement of the substrate table or sensor in the first direction.
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Den Boef Arie Jeffrey Maria
Plug Reinder Teun
VAN DER Mast Karel Diederick
Alli Iyabo S
ASML Netherlands B.V.
Sterne Kessler Goldstein & Fox P.L.L.C.
Toatley Gregory J
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