Multi-resolution inspection system and method of operating same

Details Multi-resolution inspection system and method of operating same Multi-resolution inspection system and method of operating same

2007-03-06

2007-03-06

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400

Reexamination Certificate

active

10813149

ABSTRACT:
A multi-resolution inspection system and method of operation. The system may comprise a first scanning system having a first resolution, wherein the first scanning system is operable to perform a first resolution scan of a surface area of an object to identify a location of a surface abnormality in the object. The system may also comprise a second scanning system having a second resolution, the second resolution being smaller than the first resolution. The second scanning system is operable to receive the location of the surface abnormality from the first scanning system and to automatically perform a second resolution scan of a defined region of the object around the location of the surface abnormality.

REFERENCES:
patent: 4659220 (1987-04-01), Bronte et al.
patent: 4764969 (1988-08-01), Ohtombe et al.
patent: 4998005 (1991-03-01), Rathi et al.
patent: 6122046 (2000-09-01), Almogy
patent: 6522777 (2003-02-01), Paulsen et al.
patent: 6870169 (2005-03-01), Obara et al.
patent: 101 04 425 (2001-09-01), None
patent: 0 398 781 (1990-11-01), None
Yamazaki, I. et al.; “Microscopy and Analysis of Wafer Particles Using a Semiconductor Defect Review System”; Hitachi Review, Hitachi Ltd., Tokyo, Japan, vol. 45, No. 1, Feb. 1, 1996, pp. 7-10.

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