Multiple beam inspection apparatus and method

Details Multiple beam inspection apparatus and method Multiple beam inspection apparatus and method

2005-04-12

2005-04-12

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

06879390

ABSTRACT:
Disclosed in an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.

REFERENCES:
patent: 4013367 (1977-03-01), Nagao et al.
patent: 4291990 (1981-09-01), Takasu
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5130965 (1992-07-01), Karaki et al.
patent: 5151888 (1992-09-01), Shikichi et al.
patent: 5268747 (1993-12-01), Schoeps
patent: 5506676 (1996-04-01), Hendler et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5569929 (1996-10-01), Mizutani et al.
patent: 5576825 (1996-11-01), Nakajima et al.
patent: 5602400 (1997-02-01), Kawashima
patent: 5726740 (1998-03-01), Shiozawa et al.
patent: 5737072 (1998-04-01), Emery et al.
patent: 6043932 (2000-03-01), Kusunose
patent: 6084716 (2000-07-01), Sanada et al.
patent: 6195202 (2001-02-01), Kusunose
patent: 6208411 (2001-03-01), Vaez-Iravani
patent: 0831295 (1998-03-01), None
patent: 9938002 (1999-07-01), None

Affiliated with

Also associated with

Rating

Multiple beam inspection apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multiple beam inspection apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple beam inspection apparatus and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3408286