Method of determining properties of patterned thin film...

Method of evaluating film thickness, method of detecting...

Method of measuring dishing

Method of measuring dishing using relative height measurements

Method of measuring thickness of cell gap of reflective type...

Method of monitoring thin-film processes and metrology tool...

Method of objectively evaluating a surface mark

Method of using high yielding spectra scatterometry...

Method of using scatterometry measurements to control...

Method to determine the volume of small, spherical moving...

Methods and apparatus for measurement of a dimensional...

Methods and apparatus for measuring thickness of etching...

Methods and apparatus for processing microelectronic...

Methods and systems for characterizing semiconductor materials

Methods and systems for characterizing semiconductor materials

Methods and systems for determining a composition and a...

Methods and systems for determining a critical dimension and...

Methods and systems for determining a property of a specimen...

Methods and systems for determining a thickness of a...

Methods and systems for realizing high resolution...