Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-04-26
2005-04-26
Lee, Andrew H. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S503000
Reexamination Certificate
active
06885461
ABSTRACT:
A system and method are provided for obtaining mapping profiles of transparent objects having a plurality of reflective surfaces. The object, the surfaces of which are to be mapped, is placed in an unequal path interferometer including a reference surface located a predetermined distance from the object. Coherent light is supplied in the interferometer from a tunable source; and multiple optical interferograms for each of the plurality of reflective surfaces are simultaneously recorded. These interferograms are simultaneously extracted through the use of a dynamically generated weighted least-square fitting technique; which separates interferograms from a set of superimposed interferograms to obtain a given interferogram for any one of the surfaces, free from errors resulting from the existence of the other interferograms.
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Lee Andrew H.
Phase Shift Technology, Inc.
Ptak LaValle D.
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