Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-10-30
2007-10-30
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S237100, C356S614000, C382S141000, C382S145000, C382S151000
Reexamination Certificate
active
11624666
ABSTRACT:
A metrology system includes a positioning system that produces linear and rotational motion between an imaging system and the wafer. The imaging system produces signals representing the image of the wafer in the field of view of the imaging system. A control system receives and processes the image signals, and generates corrected signals that compensate for rotational movement between the imaging system and the wafer. In response to the corrected signals, a monitor displays an image with the orientation of features on the wafer within the field of view unaffected by the rotational movement.
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Buchanan Robert
Heaton John D.
Spady Blaine R.
Yarussi Richard A.
Lauchman Layla G.
Nanometrics Incorporated
Silicon Valley Patent & Group LLP
Stock, Jr. Gordon J.
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