4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With light detector
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Wafer alignment device

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Wafer alignment sensor using a phase-shifted microlens array

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Wafer inspecting apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Wafer notch dimension measuring apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Wafer pre-alignment apparatus and method

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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