Wafer inspecting apparatus

Details Wafer inspecting apparatus Wafer inspecting apparatus

1988-02-10

1989-08-15

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With light detector

250548, 250557, 324158F, 364559, 414222, G01B 1100

Patent

active

048569046

ABSTRACT:
Semiconductor wafer inspecting apparatus comprises plural supports each adapted to support a wafer to be inspected and a feeder for feeding a wafer to each of the plural supports. The apparatus can effect accurate and rapid positioning of the wafer.

REFERENCES:
patent: 4342090 (1982-07-01), Caccoma et al.
patent: 4508453 (1985-04-01), Hara et al.
patent: 4559603 (1985-12-01), Yoshikawa
patent: 4618938 (1986-10-01), Sandland et al.

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