Wafer pre-alignment apparatus and method

Details Wafer pre-alignment apparatus and method Wafer pre-alignment apparatus and method

2003-04-11

2008-10-14

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With light detector

Reexamination Certificate

active

07436513

ABSTRACT:
A wafer pre-alignment apparatus according to this invention includes a wafer rotating member, a rotation detecting member, a light emitting member for emitting light toward the periphery of the wafer, a COD linear sensor linearly arranged and signal processing member for detecting the edge position of the wafer to acquire at least one of an orientation flat position, notch position and center position of the wafer on the basis of the edge position detected, and further includes an up-down counter for converting a signal received from the rotation detecting member into rotating position information, a measured angle setting register for storing the rotation position information when the wafer rotating member rotates by an interval angle and a comparator for comparing a set value in the measured angle setting register and a counted value in the up-down counter.

REFERENCES:
patent: 5289263 (1994-02-01), Kiyokawa et al.
patent: 5684599 (1997-11-01), Shimoyama et al.
patent: 5880816 (1999-03-01), Mimura et al.
patent: 5929976 (1999-07-01), Shibuya et al.
patent: 5982474 (1999-11-01), Akiyama et al.
patent: 5-160245 (1993-06-01), None

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