4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With light detector
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Real time telecentricity measurement

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Receiver for rotating lasers used for guiding machines, particul

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Reference input patterns for evaluation and alignment of an opti

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Reticle independent reticle stage calibration

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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