4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With light detector
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Detecting assembly for a multi-axis machine tool

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Device for and method of aligning two bodies

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Device for controlling the position of a drift advancing machine

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Device for observing alignment marks on a mask and wafer

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Device to measure the alignment of a laser amplification system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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