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Sample centering system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Scanning type projection exposure apparatus and device...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Secondary alignment fiducials for automatic alignment using mach

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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See through laser alignment target device

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Semiconductor chip position detector

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Sensor alignment apparatus for an analysis system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Sensor device and position determination process and their use f

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Servo-control alignment of nonlinear crystals

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Slide misload detection system and method

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Substrate processing apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Substrate processing apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Surface position detection apparatus and method

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Surveying system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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System and method for automated positioning of camera

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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System and method for facilitating wafer alignment by...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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System for compensating antenna membrane deflection

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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System for leveling workpieces

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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System for scanning color printing register marks printed on the

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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