Semiconductor chip position detector

Details Semiconductor chip position detector Semiconductor chip position detector

1991-12-23

1994-04-26

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356375, G01B 1100

Patent

active

053071549

ABSTRACT:
A semiconductor chip position detector including a transparent film on which semiconductor chips are placed, a film table on which the film is placed, a light source, optical fiber cables provided in the vicinity of the film table, by which light beams from the light source are radiated onto the semiconductor chips through the film having the semiconductor chips placed thereon, and a position recognition device provided above the film for recognizing the positions of the semiconductor chips based on shadow shapes of the semiconductor chips generated by the radiated light.

REFERENCES:
patent: 4515479 (1985-05-01), Pryor
patent: 4575637 (1986-03-01), Sullivan, Jr.
patent: 4647208 (1987-03-01), Bieman

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