Micromachined scanning torsion mirror and method

Micromachined torsional scanner

Micromechanical device having an improved beam

Micromechanical device having an improved beam

Micromechanical device manufactured out of incompatible material

Micromechanical device with adjustable resonant frequency by...

Micromechanical light modulator with optically interlaced output

Micromechanical optical element having a reflective surface...

Micromirror actuator

Micromirror actuator and method of manufacturing the same

Micromirror device and projector employing the same

Micromirror device with a single address electrode

Micromirror system

Micromirror type image forming apparatus and administration meth

Micromirror unit fabrication method and micromirror unit...

Micromirror unit with torsion connector having nonconstant...

Micromirror unit with torsion connector having nonconstant...

Micromirror unit with torsion connector having nonconstant...

Microoptical components and optomechanical microdeflectors with

Microoptical system for free-space optical interconnection and i