Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2005-05-10
2005-05-10
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S291000, C310S309000
Reexamination Certificate
active
06891650
ABSTRACT:
A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.
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patent: 6449079 (2002-09-01), Herrmann
patent: WO 0020899 (2000-04-01), None
Kouma Norinao
Mizuno Yoshihiro
Okuda Hisao
Sawaki Ippei
Tsuboi Osamu
Armstrong Kratz Quintos Hanson & Brooks, LLP
Fujitsu Limited
Fujitsu Media Devices Limited
Robinson Mark A.
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