Micromirror unit with torsion connector having nonconstant...

Details Micromirror unit with torsion connector having nonconstant... Micromirror unit with torsion connector having nonconstant...

2006-10-31

2006-10-31

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Pivotal or rotational element

C359S223100, C359S225100

Reexamination Certificate

active

07130099

ABSTRACT:
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

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