Thin film actuated mirror array

Thin film actuated mirror array and a method for the manufacture

Thin film actuated mirror array and method of manufacturing the

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Tip-tilt-piston actuator

Torsional hinged mirror assembly with central spines and...

Torsional micro-mechanical mirror system

Torsional rocker

Torsional vibrators and light deflectors using the torsional vib

Torsionally hinged devices with support anchors

Two axis low inertia torsional hinged optical device

Two frequency resonantly excited MEMS mirror for diode-laser...

Two-dimensional free-space optical wavelength routing...

Two-dimensional free-space optical wavelength routing...

Two-dimensional stepwise-controlled microstructure

Unfolded optics for multiple row deformable mirror device