Torsional vibrators and light deflectors using the torsional vib

Details Torsional vibrators and light deflectors using the torsional vib Torsional vibrators and light deflectors using the torsional vib

1993-10-06

1996-08-06

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359226, 359872, 310 36, 73668, G02B 7182, G02B 2608, B06B 102

Patent

active

055439560

ABSTRACT:
A second torsional vibrator having an outer frame and a second torsional spring is formed on the outer side of a first torsional vibrator having a pair of torsional springs and a plate member (reflection mirror), with a second torsional vibrator being fixed by the fixed part. The resonant frequency for the first torsional vibrator is set higher than that for the second torsional vibrator. The outer frame in the second torsional vibrator is driven substantially at the resonant frequency of the first torsional vibrator by an electromagnetic or electrostatic force. As a result, it becomes possible to obtain a stable and large scanning angle by using only a small driving force.

REFERENCES:
patent: 3642344 (1972-02-01), Corker
patent: 3666974 (1972-05-01), Dostal
patent: 3758199 (1973-09-01), Thaxter
patent: 4317611 (1982-03-01), Petersen
patent: 4943147 (1990-07-01), Mizuno et al.
patent: 5245463 (1993-09-01), Goto
patent: 5268784 (1993-12-01), Chaya

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