Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent
1997-06-20
1999-11-23
Epps, Georgia
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
359291, 359292, 359849, 359846, 359872, G02B 2608, G02B 7182
Patent
active
059910640
ABSTRACT:
An array of M.times.N thin film actuated mirrors for use in an optical projection system, the array comprises an active matrix including a substrate and an array of M.times.N connecting terminals and an array of M.times.N actuating structures. Each of the actuating mirror structures includes a first thin film electrode, a barrier member, a thin film electrodisplacive member, a second thin film electrode and an elastic member. In order to improve mirror morphology and improve the adhesivity between thin films, the barrier layer is placed on top of the thin film electrodisplacive layer and the top surface of second thin film layer is ion-damaged by using an ion beam, respectively.
REFERENCES:
patent: 5627673 (1997-05-01), Min
patent: 5636051 (1997-06-01), Lim
patent: 5636070 (1997-06-01), Ji et al.
patent: 5757539 (1998-05-01), Min
Daewoo Electronics Co. Ltd.
Epps Georgia
Lester Evelyn A.
LandOfFree
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