Two-dimensional stepwise-controlled microstructure

Details Two-dimensional stepwise-controlled microstructure Two-dimensional stepwise-controlled microstructure

2006-05-09

2006-05-09

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S900000, C310S309000

Reexamination Certificate

active

07042609

ABSTRACT:
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.

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