Torsionally hinged devices with support anchors

Details Torsionally hinged devices with support anchors Torsionally hinged devices with support anchors

2005-05-31

2005-05-31

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S198100, C359S199200, C359S201100, C359S202100, C347S260000

Reexamination Certificate

active

06900918

ABSTRACT:
A functional surface, such as a reflective surface, is supported by a pair of torsional hinges for pivoting about a first axis which in turn is supported by a pair of anchors, according to one embodiment. The reflective surface may be driven into resonant oscillations about the first axis by inertially coupling energy to the device. According to a dual axis embodiment, the reflective surface is attached by torsional hinges to a gimbals portion which in turn is attached to the support members by a second pair of torsional hinges which are orthogonal with the first pair of hinges so as to provide for pivoting of the surface about both pairs of torsional hinges. Thus, a light source may be reflected from a reflective surface to produce a beam sweep and moved orthogonally by the gimbals portion. The devices may be etched from silicon.

REFERENCES:
patent: 5583688 (1996-12-01), Hornbeck
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 5982528 (1999-11-01), Melville
patent: 6069725 (2000-05-01), Melville
patent: 2004/0004775 (2004-01-01), Turner et al.

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