Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2005-03-29
2005-03-29
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S198100, C359S223100, C359S225100, C385S018000, C385S047000
Reexamination Certificate
active
06873447
ABSTRACT:
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.
REFERENCES:
patent: 5414540 (1995-05-01), Patel et al.
patent: 5917625 (1999-06-01), Ogusu et al.
patent: 5960133 (1999-09-01), Tomlinson
patent: 5999672 (1999-12-01), Hunter et al.
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6040935 (2000-03-01), Michalicek
patent: 6097519 (2000-08-01), Ford
patent: 6097859 (2000-08-01), Solgaard
patent: 6108471 (2000-08-01), Zhang et al.
patent: 6128122 (2000-10-01), Drake et al.
patent: 6263127 (2001-07-01), Dragone et al.
patent: 6307657 (2001-10-01), Ford
patent: 6501877 (2002-12-01), Weverka et al.
Rallison, R.D. “Dense Wavelength Division Multiplexing (DWDM) and the Dickson Grating,” White Paper, Jan. 6, 2001.
T. Akiyama, et al.; “Controlled Stepwise Motion in Polysilicon Microstructures,” Journal of Microelectromechanical Systems, vol. 2, No. 3, Sep. 1993; pp. 106-110.
C.M.A. Ashruf, et al., “Galvanic porous silicon formation without external contacts,” Sensors and Actuators 74 (1999) pp. 118-122.
Kenneth Bean, et al., “Anisotropic Etching of Silicon,” IEEE Transactions on Electron Devices, vol. Ed-25, No. 10, Oct. 1978.
Dino R. Ciarlo, “A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers,” Lawrence Livermore Nat'l Laboratory, Mar. 1, 1992.
A.S. Dewa, et al., “Development of a Silicon Two-Axis Micromirror for an Optical Cross-Connect,” Solid State Sensors and Actuators Workshop, Hilton Head, South Carolina, pp. 93-96 (no date).
Joseph Ford et al., “Wavelength Add Drop Switching Using Tilting Micromirrors,” Journal of Lightwave Technology, vol. 17, No. 5, May 1999.
J. Grade et al., A Large-Deflection Electrostatic Actuator for Optical Switching Applications, Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, Jun. 4-8, 2000; pp. 97-100.
V. Kaajakari et al.; “Ultrasonic Actuation for MEMS Dormancy-Related Stiction Reduction,” In MEMS Reliability for Critical Applications, Proceedings of SAPIE vol. 4180 (2000); pp. 60-65.
T.L. Koch et al., “Anisotropically etched deep gratings for InP/InGaAsP optical devices,” J.App. Phys. 62 (8), Oct. 15, 1987.
I. Nishi et al., “Broad-Passband-Width Optical Filter for Multi-Demultiplexer Using a Diffraction Grating and a Retroreflector Prism,” Electronics Letters, vol. 21, No. 10, May 9, 1985.
P. Phillippe et al., “Wavelength demultiplexer: using echelette gratings on silicon substrate,” Applied Optics, vol. 24, No. 7, Apr. 1, 1985.
M. Schilling et al., “Deformation-free overgrowth of reactive ion beam etched submicron structures in InP by liquid phase epitaxy,” Appl. Phys. Lett. 49 (12), Sep. 22, 1986.
Z. J. Sun et al., Demultiplexer with 120 channels and 0.29-nm Channel Spacing, IEEE Photonics Technology Letters, vol. 10, No. 1, Jan. 1998.
W. Tang, et al., “Electrostatically Balanced Comb Drive for Controlled Levitation,” Reprinted from Technical Digest IEEE Solid-State Sensor and Actuator Workshop, Jun. 1990; pp. 198-202.
L. Torcheux et al., “Electrochemical Coupling Effects on the Corrosion of Silicon Samples in HF Solutions,” J. Electrochem.Soc., vol. 142, No. 6, Jun. 1995.
P. VanKessel et al., “A MEMS-Based Projection Display,” Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998; pp. 1687-1704.
Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion; dissertation by C. Keller, Fall 1998.
Gimballed Electrostatic Microactuators with Embedded Interconnects; dissertation by L. Muller; Spring 2000.
Phan James
PTS Corporation
Townsend and Townsend / and Crew LLP
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