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MEMS gyroscope with parametric gain

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MEMS load cell and strain sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MEMS magnetic device and method

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS sensor driving device, MEMS sensor driving method, and...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS sensor systems and methods

Measuring and testing – Speed – velocity – or acceleration – Response to multiple sensing means or motion conditions
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MEMS sensor with single central anchor and motion-limiting...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MEMS suspension and anchoring design

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS switch triggered by shock and/or acceleration

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS teeter-totter accelerometer having reduced non-linearty

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MEMS teeter-totter apparatus with curved beam and method of...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS vertical comb drive with improved vibration performance

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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MEMS-integrated inertial measurement units on a common...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method and apparatus for a micromachined multisensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method and apparatus for analyzing rotating machines

Measuring and testing – Speed – velocity – or acceleration
Patent

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Method and apparatus for closed loop offset cancellation

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Method and apparatus for compensation of micromachined sensors

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method and apparatus for detecting free fall

Measuring and testing – Speed – velocity – or acceleration – Recording or registering interrelated factors
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Method and apparatus for determining the operating speed of a ra

Measuring and testing – Speed – velocity – or acceleration – Magnetic speed measuring or mechanical speed measuring with...
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Method and apparatus for generating driving signals for a vibrat

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method and apparatus for improving performance of a force...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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