MEMS gyroscope with parametric gain
MEMS load cell and strain sensor
MEMS magnetic device and method
MEMS sensor driving device, MEMS sensor driving method, and...
MEMS sensor systems and methods
MEMS sensor with single central anchor and motion-limiting...
MEMS suspension and anchoring design
MEMS switch triggered by shock and/or acceleration
MEMS teeter-totter accelerometer having reduced non-linearty
MEMS teeter-totter apparatus with curved beam and method of...
MEMS vertical comb drive with improved vibration performance
MEMS-integrated inertial measurement units on a common...
Method and apparatus for a micromachined multisensor
Method and apparatus for analyzing rotating machines
Method and apparatus for closed loop offset cancellation
Method and apparatus for compensation of micromachined sensors
Method and apparatus for detecting free fall
Method and apparatus for determining the operating speed of a ra
Method and apparatus for generating driving signals for a vibrat
Method and apparatus for improving performance of a force...