MEMS load cell and strain sensor

Details MEMS load cell and strain sensor MEMS load cell and strain sensor

2008-12-19

2011-12-27

Caputo, Lisa (Department: 2855)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504030, C073S504120, C073S504150

Reexamination Certificate

active

08082788

ABSTRACT:
A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth of the stationary pad. The location of the coupling between the actuator spoke and the hub offsets a line of action of a force on the actuator spoke from a center of rotation of the hub.

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Jun Guo et al., “High-gain Mechanically Amplified Capacitive Strain Sensor,” 2005 IEEE, pp. 464-467, Oct. 30-Nov. 3.

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