MEMS switch triggered by shock and/or acceleration

Details MEMS switch triggered by shock and/or acceleration MEMS switch triggered by shock and/or acceleration

2006-06-07

2009-02-24

Pert, Evan (Department: 2826)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C257S415000

Reexamination Certificate

active

07493815

ABSTRACT:
An acceleration-triggered or shock-triggered, smart, tunable MEMS switch that may function as both a classic accelerometer and an acceleration threshold detector. A parallel element MEMS device has a stationary and a movable element forming a capacitor. Varying acceleration moves the movable member with respect to the stationary member, thereby changing the capacitance of the device. The capacitance varying may be used, in cooperation with appropriate circuitry, to provide a signal representative of instantaneous acceleration. By applying a biasing voltage, the movable element may be positioned in a predetermined fashion such that acceleration of a predetermined magnitude causes the movable element to pull in (snap down). The movable and stationary elements may function as a switch such that when the predetermined acceleration or shock level occurs, electrodes close, a current flows between the elements so that an external device such as an air bag may be activated.

REFERENCES:
patent: 5353641 (1994-10-01), Tang
patent: 6388299 (2002-05-01), Kang et al.
patent: 6388300 (2002-05-01), Kano et al.
patent: 2002/0008296 (2002-01-01), Chan et al.

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