Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-11-28
2006-11-28
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S514320, C073S514380
Reexamination Certificate
active
07140250
ABSTRACT:
An apparatus and method for force sensing device having a pendulous mechanism proof mass formed in a silicon semiconductor substrate and structured for rotation about an intermediate rotational axis, the proof mass being substantially rectangular in shape with opposing first and second lateral peripheral edges and opposing first and second endwise peripheral edges. A plurality of capacitor comb teeth are formed symmetrically along the opposing first and second endwise peripheral proof mass edges and along the opposing first and second lateral peripheral proof mass edges adjacent to the first and second endwise peripheral edges, and one or more mass reduction apertures are formed in an interior portion of the proof mass on one side of the intermediate hinge axis.
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ABSTRACT, Patent Abstracts of Japan, Publication No. 10104263, Publication Date: Apr. 24, 1998; Application No. JP19960279995 19961001; Muro Hideo, et al. “Semiconductor Acceleration Sensor and Manufacture Thereof”.
Leonardson Ronald B.
Malametz David L.
Honeywell International , Inc.
Kwok Helen
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