MEMS sensor driving device, MEMS sensor driving method, and...

Details MEMS sensor driving device, MEMS sensor driving method, and... MEMS sensor driving device, MEMS sensor driving method, and...

2006-10-09

2008-11-18

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514210

Reexamination Certificate

active

07451647

ABSTRACT:
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

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Research for Gyroscopes and the Integration by Micromachining, 2000, p. 123-124.

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