Method and apparatus for compensation of micromachined sensors

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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7350412, 7350413, G01C 1900, G01P 1508

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active

056168640

ABSTRACT:
A yaw rate sensor having a vibrating ring microstructure surrounded by electrodes capacitively coupled to the ring has vibration responsive circuits with inputs connected to several of the sensors, the circuits having outputs connected to others of the electrodes for driving or influencing the vibration. The circuits produce a main drive voltage to excite the ring to resonance, a feedback drive voltage to provide force-to-rebalance correction, and a dc compensation voltage to tune the ring to a single resonance frequency. An economy of electrode space is achieved by using some electrodes for more than one function, e.g. feedback and compensation.

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patent: 5383362 (1995-01-01), Putty et al.
patent: 5450751 (1995-09-01), Putty et al.
Michael W. Putty et al., "A Micromachined Vibrating Ring Gyroscope," Solid State Sensor and Actuator Workshop, Jun. 1994, pp. 213-220.

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