Method and apparatus for a micromachined multisensor

Details Method and apparatus for a micromachined multisensor Method and apparatus for a micromachined multisensor

2011-07-19

2011-07-19

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

07980133

ABSTRACT:
In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.

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