Microgyroscope with vibratory structure having a multitude of gr
Micromachined acceleration and coriolis sensor
Micromachined acceleration and coriolis sensor
Micromachined accelerometer
Micromachined accelerometer gyroscope
Micromachined accelerometer with electrostatic return
Micromachined apparatus utilizing box suspensions
Micromachined apparatus with drive/sensing fingers in...
Micromachined apparatus with split vibratory masses
Micromachined capacitive lateral accelerometer device and...
Micromachined comb capacitive accelerometer
Micromachined comb capacitive accelerometer
Micromachined comb capacitive accelerometer
Micromachined device with enhanced dimensional control
Micromachined device with enhanced dimensional control
Micromachined device with rotationally vibrated masses
Micromachined device with rotationally vibrated masses
Micromachined devices
Micromachined devices
Micromachined devices and connections over a substrate