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Microgyroscope with vibratory structure having a multitude of gr

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromachined acceleration and coriolis sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromachined acceleration and coriolis sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromachined accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromachined accelerometer gyroscope

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromachined accelerometer with electrostatic return

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromachined apparatus utilizing box suspensions

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromachined apparatus with drive/sensing fingers in...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromachined apparatus with split vibratory masses

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromachined capacitive lateral accelerometer device and...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromachined comb capacitive accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromachined comb capacitive accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromachined comb capacitive accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromachined device with enhanced dimensional control

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromachined device with enhanced dimensional control

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromachined device with rotationally vibrated masses

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromachined device with rotationally vibrated masses

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromachined devices

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromachined devices

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromachined devices and connections over a substrate

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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