Micromachined apparatus utilizing box suspensions

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S504120, C073S514380

Reexamination Certificate

active

07089792

ABSTRACT:
A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about a plane normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. The resonating structures include phase and anti-phase masses that are mechanically coupled in order to produce a single resonance frequency for the entire resonating system. Rotation of the micromachined gyroscope about the plane produces a rotational force on the frame. The frame is suspended in such a way that its motion is severely restricted in all but the rotational direction. Sensors on all sides of the frame detect the rotational deflection of the frame for measuring the change in direction.

REFERENCES:
patent: 2309853 (1943-02-01), Lyman et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4510802 (1985-04-01), Peters
patent: 4524619 (1985-06-01), Staudte
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4884446 (1989-12-01), Ljung
patent: 5016072 (1991-05-01), Greiff
patent: 5016076 (1991-05-01), Darwish
patent: 5025346 (1991-06-01), Tang et al.
patent: 5056366 (1991-10-01), Fersht et al.
patent: 5111693 (1992-05-01), Greiff
patent: 5144184 (1992-09-01), Greiff
patent: 5195371 (1993-03-01), Greiff
patent: 5203208 (1993-04-01), Bernstein
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5259247 (1993-11-01), Bantien
patent: 5273939 (1993-12-01), Becker et al.
patent: 5313835 (1994-05-01), Dunn
patent: 5329815 (1994-07-01), Dunn et al.
patent: 5341682 (1994-08-01), Hulsing, II
patent: 5343749 (1994-09-01), Macy
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5359893 (1994-11-01), Dunn
patent: 5367217 (1994-11-01), Norling
patent: 5377544 (1995-01-01), Dunn
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5408877 (1995-04-01), Greiff et al.
patent: 5481914 (1996-01-01), Ward
patent: 5492596 (1996-02-01), Cho
patent: 5496436 (1996-03-01), Bernstein et al.
patent: 5505084 (1996-04-01), Greiff et al.
patent: 5511419 (1996-04-01), Dunn
patent: 5515724 (1996-05-01), Greiff et al.
patent: 5530342 (1996-06-01), Murphy
patent: 5535902 (1996-07-01), Greiff
patent: 5537872 (1996-07-01), Frere et al.
patent: 5555765 (1996-09-01), Greiff
patent: 5581035 (1996-12-01), Greiff
patent: 5600064 (1997-02-01), Ward
patent: 5600065 (1997-02-01), Kar et al.
patent: 5604309 (1997-02-01), Ward
patent: 5604312 (1997-02-01), Lutz
patent: 5608351 (1997-03-01), Ward
patent: 5635638 (1997-06-01), Geen
patent: 5635639 (1997-06-01), Greiff et al.
patent: 5635640 (1997-06-01), Geen
patent: 5646348 (1997-07-01), Greiff et al.
patent: 5650568 (1997-07-01), Greiff et al.
patent: 5672949 (1997-09-01), Ward
patent: 5696323 (1997-12-01), Hulsing, II
patent: 5717140 (1998-02-01), Hulsing, II
patent: 5734105 (1998-03-01), Mizukoshi
patent: 5747961 (1998-05-01), Ward et al.
patent: 5763781 (1998-06-01), Netzer
patent: 5767405 (1998-06-01), Bernstein et al.
patent: 5783973 (1998-07-01), Weinberg et al.
patent: 5795988 (1998-08-01), Lo et al.
patent: 5796001 (1998-08-01), Greiff et al.
patent: 5869760 (1999-02-01), Geen
patent: 5886816 (1999-03-01), Faris
patent: 5892153 (1999-04-01), Weinberg et al.
patent: 5895850 (1999-04-01), Buestgens
patent: 5895851 (1999-04-01), Kano et al.
patent: 5911156 (1999-06-01), Ward et al.
patent: 5918280 (1999-06-01), Gang et al.
patent: 5920012 (1999-07-01), Pinson
patent: 5945600 (1999-08-01), Touge et al.
patent: 5952572 (1999-09-01), Yamashita et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 5987986 (1999-11-01), Wyse et al.
patent: 5992233 (1999-11-01), Clark
patent: 6009751 (2000-01-01), Ljung
patent: 6032531 (2000-03-01), Roszhart
patent: 6044707 (2000-04-01), Kato
patent: 6064169 (2000-05-01), Ward et al.
patent: 6067858 (2000-05-01), Clark et al.
patent: 6070463 (2000-06-01), Moriya et al.
patent: 6089089 (2000-07-01), Hsu
patent: 6122961 (2000-09-01), Geen et al.
patent: 6128953 (2000-10-01), Mizukoshi
patent: 6155115 (2000-12-01), Ljung
patent: 6164134 (2000-12-01), Cargille
patent: 6189381 (2001-02-01), Huang et al.
patent: 6190571 (2001-02-01), Kato
patent: 6230563 (2001-05-01), Clark et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6250157 (2001-06-01), Touge
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6282960 (2001-09-01), Samuels et al.
patent: 6289733 (2001-09-01), Challoner et al.
patent: 6311555 (2001-11-01), McCall et al.
patent: 6321598 (2001-11-01), Iwaki et al.
patent: 6505511 (2003-01-01), Geen et al.
patent: 6516666 (2003-02-01), Li
patent: 6561029 (2003-05-01), Folkmer et al.
patent: 6767758 (2004-07-01), Geen
patent: 6860151 (2005-03-01), Flatt et al.
patent: 2003/0005767 (2003-01-01), Hulsing, II
patent: 2003/0131664 (2003-07-01), Mochida et al.
patent: 2003/0131669 (2003-07-01), Osawa
patent: WO 93/05401 (1993-03-01), None
patent: WO 96/39615 (1996-12-01), None
patent: WO 01/79862 (2001-10-01), None
Weinberg et al.,A Micromachined Comb-Drive Tuning Fork Rate Gyroscope, Proceedings of the 49thAnnual Meeting of the Institute of Navigation, Jun. 21-23, 1993, 7 pages.
Seshia et al.,Integrated Microelectromechanical Resonant Output Gyroscope, updated, online <http://hera.berkeley.edu/IRO/Summary/o l abstracts/ aseshia.1.html>, printed Feb. 6, 2002, 2 pages.
Geen et al.,Single-Chip Surface Micromachined Integrated Gyroscope with 50 °/h Allan Deviation, IEEE Journal of Solid-State Circuits, vol. 37, No. 12, Dec. 2002, 7 pages.
Authorized Officer Mildred Condron,International Search Report and The Written Opinion of the International Searching Authority, International Searching Authority, Dec. 22, 2004, 13 pages.

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