Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2005-09-06
2005-09-06
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
Reexamination Certificate
active
06938484
ABSTRACT:
A high-sensitivity and low-noise micromachined capacitive lateral accelerometer device having an input axis and a monolithic, three-axis accelerometer utilizing the device are provided. The device includes at least one electrode having a side surface normal to the input axis. A relatively large proofmass has at least one side surface normal to the input axis and extends along a width of the proofmass. The proofmass is movable against acceleration relative to the at least one electrode due to inertial force along the input axis to obtain a capacitive variation between the at least one electrode and the proofmass. The side surfaces are spaced apart to define a narrow, high-aspect ratio sensing gap which extends along substantially the entire width of the proofmass. The proofmass forms a sense capacitor with the at least one electrode.
REFERENCES:
patent: 4711128 (1987-12-01), Boura
patent: 6035714 (2000-03-01), Yazdi et al.
patent: 6167757 (2001-01-01), Yazdi et al.
patent: 6286369 (2001-09-01), Yazdi et al.
patent: 6402968 (2002-06-01), Yazdi et al.
patent: 197 50 350 (1999-08-01), None
patent: 2001133479 (2001-05-01), None
patent: 2001264355 (2001-09-01), None
Yazdi, Navid, et al., Micromachined Inertial Sensors, Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998, pps. 1640-1659.
Yazdi, Navid, Micro-g Silicon Accelerometers with High Performance CMOS Interface Circuitry, EECS, 1999, The University of Michigan, Ann Arbor, Michigan.
Analog-Devices, ADXL50, Monolithic Accelerometer with Signal Conditioning, Data Sheet, 1996, pps. 1-15.
Analog Devices, ADXL105, High Accuracy +-1g to +-5g Single Axis Imems Accelerometer with Analog Input, 1999, pps. 1-8.
Lu, C., et al., A Monolithic Surface Micromachined Accelerometer with Digital Output, IEEE Journal of Solid-State Circuits, vol. 30, No. 12, Dec. 1995, pps. 1367-1373.
Boser, Bernhard E., et al., Surface Micromachined Accelerometers, IEEE Journal of Solid-State Circuits, vol. 31, No. 3, Mar. 3, 1996, pps. 366-375.
CROSS-BOW, High Sensitivity Accelerometer, LF Series Data Sheet, San Jose, California, 2001.
Luo, Hao, et al., A 1 mG Lateral CMOS-MEMS Accelerometer, 13thIEEE International Conference on Micro Electro Mechanical Systems, MEMS 2000, Miyazaki, Japan.
Wu, Jiangfeng, et al., A Low-Noise Low-Offsett Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS Accelerometers, IEEE International Solid State Circuits Conference ISSCC 2002, San Francisco, California.
Lemkin, M., et al., A Low-Noise Digital Accelerometer Using Integrated SOI-MEMS Technology, 10thInternational Conference Solid-State Sensors and Actuators, Transducers 1999, Sendai, Japan.
Ishihara, Kei, et al., An Inertial Sensor Technology Using DRIE and Wafer Bonding with Interconnecting Capability, Journal of Microelectromechanical Systems, vol. 8, No. 4, Dec. 1999, pps. 403-408.
Griffin, W.S., et al., A Study of Fluid Squeeze-Film Damping, ASME Journal of Basic Engineering, Jun. 1996, pps. 451-456.
Zhang, Xia, et al., Viscous Air Damping In Laterally Driven Microresonators, Proceedings of The IEEE Micro Electro Mechanical Systems, 1994, pps. 199-204.
Henrion, Widge, et al., Wide Dynamic Range Direct Digital Accelerometer, Wide Dynamic Range Direct Digital Accelerometer, Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, 1990.
Yazdi, Navid, et al., All-Silicon Single-Wafer Micro-g Accelerometer with a Combined Surface and Bulk Micromachining Process, Journal of Microelectromechanical Systems, vol. 9, No. 4, Dec. 4, 2000, pps. 544-550.
Rudolf, F., et al., Precision Accelerometers with ug Resolution, Sensor and Actuators, A21-A23, 1990, pps. 297-302.
Maxwell, Peter et al., Design Through to Production of a MEMS digital Accelerometer for Seismic Acquisition, First Break, vol. 19, Mar. 3, 2001.
Xiao, Zhixiong, et al., Laterally Capacity Sensed Accelerometer Fabricated with the Anodic Bonding and the High Aspect Ratio Etching, 10thInternational Conference Solid-State Sensors and Actuators, Transducers 1999, Sendai, Japan.
Chae, Junseok, et al., A Hybrid Silicon-On-Glass (SOG) Lateral Micro-Accelerometer With CMOS Readout Circuitry, 15thIEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, Las Vegas, Nevada.
Yazdi, Navid, et al., An All-Silicon Single-Wafer Fabrication Technology For Precision Microaccelerometers, 9thInternational Conference Solid-State Sensors and Actuators, Transducers 1997, Chicago, IL, pps. 1181-1184.
Doscher, James, ADXL105: a Lower Noise, Wider Bandwidth Accelerometer Rivals Performance of More Expensive Sensors, 1999 Analog Dialogue 33-6, 1999 Analog Devices.
HONEYWELL, ASA7000, Micromachined Accelerometer, Data Sheet, Jul. 2001.
MOTOROLA, MMA2201D, Surface Mount Micromachined Accelerometer, Data Sheet 2000, pps. 1-8.
Roylance, L.M., et al., A Batch Fabricated Silicon Accelerometer, IEEE Trans Electron Devices, vol. ED-26, No. 12, Dec. 1979, pps. 1911-1917.
Salian, A., et al., A High-Performance Hybrid CMOS Microaccelerometer, Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, Jun. 4-8, 2000, pps. 285-288.
Roark, R.J., et al. Roark's Formulas for Stress and Strain, 6thEd. 1989, New York: McGraw-Hill, xiv, vol. 763.
Warren, Keith, Navigation Grade Silicon Accelerometers with Sarificially Etched SIMOX and BESOI Structure, Solid-State Sensors and Actuators Workshop, Jun. 13-16, 1994 Hilton Head Island, SC, pps. 69-72.
ENDEVCO, Variable Capacitance Accelerometer, Model 7596, Data Sheet, 2000.
Chae, Junseok, et al., A Monolithic Three-Axis Silicon Capacitive Accelerometer With Micro-G Resolution, 12thIEEE International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2003, Boston, MA.
Chae Junseok
Najafi Khalil
Brooks & Kushman P.C.
Kwok Helen
The Regents of the University of Michigan
LandOfFree
Micromachined capacitive lateral accelerometer device and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined capacitive lateral accelerometer device and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined capacitive lateral accelerometer device and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3434313