Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1996-03-15
1999-03-09
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351416, 361280, 3612833, G01P 15125
Patent
active
058803696
ABSTRACT:
A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures. Such dimensional relationships are achieved through consistent spacing between desired operating structures and by adding new structures (i.e., dimensional control structures) which provide additional consistent spacing at desired locations within the micromachined device.
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Farash Jeffrey A.
Samuels Howard R.
Analog Devices Inc.
Moller Richard A.
Williams Hezron E.
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