Micromachined accelerometer with electrostatic return

Details Micromachined accelerometer with electrostatic return Micromachined accelerometer with electrostatic return

1986-04-14

1987-12-08

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

361280, G01P 1513, G01P 15125

Patent

active

047111283

ABSTRACT:
An accelerometer is provided using at least one sensor with flat pendular structure formed by micro-machining a fine monocrystal wafer and comprising a flat mobile mass suspended from the rest of the structure by means of two thin parallel strips situated on each side of the mass. The mass comprises at least one mobile capacitor plate disposed between two fixed capacitor plates provided on the fixed part of the structure. The mobile plate is brought to a voltage V.sub.O, whereas the fixed plates are respectively brought to voltages V.sub.1 and V.sub.2 which are capable of generating an electrostatic return force on the mobile mass.

REFERENCES:
patent: 3877313 (1975-04-01), Ferriss
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4345474 (1982-08-01), Deval
patent: 4600934 (1986-07-01), Aine et al.

Affiliated with

Also associated with

Rating

Micromachined accelerometer with electrostatic return does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromachined accelerometer with electrostatic return, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined accelerometer with electrostatic return will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-16582