Micromachined accelerometer

Details Micromachined accelerometer Micromachined accelerometer

1996-03-21

1997-09-16

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351406, 73654, G01P 1508

Patent

active

056683197

ABSTRACT:
A fluid proof mass accelerometer fabricated from bonded substrate layers. The device includes a plurality of micromachined fluid cavities which are joined by micromachined fluid channels. The fluid cavities extend from the bonded inner surfaces of the substrate layers to thin resilient membranes which are generally coplanar with the surface. In one embodiment, each substrate layer is thinned toward its outer surface thereby forming integral resilient membranes. In another embodiment, the cavities extend entirely through base substrate layers and thin substrate layers are bonded to the base substrate layers to form a resilient membranes over the cavities. The cavities and channels are sealed and filled with a high density fluid and, when subjected to acceleration, force exerted on the fluid contained within the cavities will cause the cavities to deflect. Signals from pressure sensors positioned on the membranes are algebraically combined to determine translational and rotational acceleration.

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