Micromachined acceleration and coriolis sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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Details

7351415, 7351429, G01C 1900, G01P 1510

Patent

active

060325313

ABSTRACT:
A solid state silicon micromachined acceleration and Coriolis (MAC) sensor that measures linear and angular motion. The MAC sensor is a single device that performs the functions of a conventional accelerometer and a gyroscope simultaneously. The MAC sensor is unique in that it is a differential dual stage device using only one micromachined proof mass to measure both linear and angular motions. The single proof mass is connected to opposing electromechanical resonators in a monolithic microstructure made from single crystal silicon. This unique design offers improvements in measurement performance and reductions in fabrication complexity that are beyond the state the art of earlier micromachined inertial sensors.

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