Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1995-04-24
1997-08-12
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7351429, G01C 1900, G01P 344, G01P 1508
Patent
active
056567782
ABSTRACT:
A solid state silicon micromachined acceleration and Coriolis (MAC) sensor that measures linear and angular motion. The MAC sensor is a single device that performs the functions of a conventional accelerometer and a gyroscope simultaneously. The MAC sensor is unique in that it is a differential dual stage device using only one micromachined proof mass to measure both linear and angular motions. The single proof mass is connected to opposing electromechanical resonators in a monolithic microstructure made from single crystal silicon. This unique design offers improvements in measurement performance and reductions in fabrication complexity that are beyond the state the art of earlier micromachined inertial sensors.
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Kearfott Guidance and Navigation Corporation
Moller Richard A.
Williams Hezron E.
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