Micromachined gyroscopic sensor with detection in the plane...
Micromachined inertial sensor for measuring rotational...
Micromachined members coupled for relative rotation by torsion b
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor
Micromachined rate and acceleration sensor and method
Micromachined rate and acceleration sensor having vibrating beam
Micromachined sensor with quadrature suppression
Micromachined vibratory gyroscope and method with electronic...
Micromachined vibratory gyroscope with electrostatic coupling
Micromachined vibratory rate gyroscope
Micromechanical gradient sensor