Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-01-09
2007-01-09
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504140
Reexamination Certificate
active
10531456
ABSTRACT:
The invention relates to a microgyroscope, that is to say an inertial micromechanical sensor dedicated to the measurement of angular velocities, which is produced by micromachining techniques on a silicon wafer. The gyroscope comprises two symmetrical moving assemblies coupled via a coupling structure. Each of the two assemblies comprises a moving mass surrounded by a moving intermediate frame. The frame is connected to the coupling structure and can vibrate in two degrees of freedom in orthogonal directions Ox and Oy in the plane of the wafer. The mass is connected on one side to the frame and on the other side to fixed anchoring regions via linking means that allow the vibration movement along the Oy direction to be transmitted to the mass without permitting movement of the mass along the Ox direction. An excitation structure is associated with the frame in order to excite its vibration along Ox. A movement detection structure is associated with the mass in order to detect its vibration along Oy.
REFERENCES:
patent: 5604312 (1997-02-01), Lutz
patent: 5728936 (1998-03-01), Lutz
patent: 6009751 (2000-01-01), Ljung
patent: 6705164 (2004-03-01), Willig et al.
patent: 7051591 (2006-05-01), Chaumet et al.
patent: 2004/0250620 (2004-12-01), Nicu et al.
patent: 44 28 405 (1996-02-01), None
patent: 02/066929 (2002-08-01), None
Inglese Jérôme
Leverrier Bertrand
Nicu Liviu
Rougeot Claude
Kwok Helen
Lowe Hauptman & Berner LLP
Thales
LandOfFree
Micromachined gyroscopic sensor with detection in the plane... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined gyroscopic sensor with detection in the plane..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined gyroscopic sensor with detection in the plane... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3772345