Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-10-28
1999-05-18
Oda, Christine
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
G01C19/00
Patent
active
059052015
ABSTRACT:
A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a pair of torsion stabilizing struts coupling a portion of the proof mass to the frame.
REFERENCES:
patent: 2544646 (1951-03-01), Barnaby et al.
patent: 3062059 (1962-11-01), Singleton
patent: 4102202 (1978-07-01), Ferries
patent: 4336718 (1982-06-01), Washburn
patent: 4372173 (1983-02-01), EerNisse et al.
patent: 4445376 (1984-05-01), Merhav
patent: 4467651 (1984-08-01), Peters et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4510802 (1985-04-01), Peters
patent: 4512192 (1985-04-01), Peters
patent: 4517841 (1985-05-01), Peters et al.
patent: 4522062 (1985-06-01), Peters
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4541105 (1985-09-01), Lee et al.
patent: 4553436 (1985-11-01), Hanson
patent: 4583404 (1986-04-01), Bernard et al.
patent: 4584885 (1986-04-01), Cadwell
patent: 4590801 (1986-05-01), Merhav
patent: 4592233 (1986-06-01), Peters
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4599896 (1986-07-01), Stewart
patent: 4628735 (1986-12-01), Kirkpatrick
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4665748 (1987-05-01), Peters
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4706259 (1987-11-01), Paros et al.
patent: 4711128 (1987-12-01), Boura
patent: 4712426 (1987-12-01), Peters
patent: 4712427 (1987-12-01), Peters
patent: 4727752 (1988-03-01), Peters
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4750363 (1988-06-01), Norling
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4766768 (1988-08-01), Norling et al.
patent: 4782700 (1988-11-01), Hulsing
patent: 4786861 (1988-11-01), Hulsing, II et al.
patent: 4788864 (1988-12-01), Pier
patent: 4799385 (1989-01-01), Hulsing et al.
patent: 4810922 (1989-03-01), Hirsch
patent: 4811602 (1989-03-01), Hulsing
patent: 4814680 (1989-03-01), Hulsing
patent: 4821572 (1989-04-01), Hulsing, II
patent: 4841773 (1989-06-01), Stewart
patent: 4848156 (1989-07-01), Hulsing
patent: 4864861 (1989-09-01), Hulsing
patent: 4870588 (1989-09-01), Merhav
patent: 4872342 (1989-10-01), Hanson et al.
patent: 4872343 (1989-10-01), Peters et al.
patent: 4879914 (1989-11-01), Norling
patent: 4881408 (1989-11-01), Hulsing et al.
patent: 4882933 (1989-11-01), Peterson et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4891982 (1990-01-01), Norling
patent: 4891983 (1990-01-01), Stewart
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4896268 (1990-01-01), MacGugan
patent: 4901586 (1990-02-01), Blake et al.
patent: 4912990 (1990-04-01), Norling
patent: 4918277 (1990-04-01), Zimmer
patent: 4920801 (1990-05-01), Church
patent: 4922756 (1990-05-01), Henrion
patent: 4928203 (1990-05-01), Swindal et al.
patent: 4930351 (1990-06-01), Macy et al.
patent: 4945765 (1990-08-01), Roszhart
patent: 4955108 (1990-09-01), Pier
patent: 4987780 (1991-01-01), Abbink et al.
patent: 4996877 (1991-03-01), Stewart
patent: 5006487 (1991-04-01), Stokes
patent: 5007289 (1991-04-01), Stewart et al.
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5056366 (1991-10-01), Fersht et al.
patent: 5065627 (1991-11-01), Stewart et al.
patent: 5205171 (1993-04-01), O'Brian et al.
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5241862 (1993-09-01), Abbink et al.
patent: 5253524 (1993-10-01), Abbink et al.
patent: 5277053 (1994-01-01), McLane et al.
patent: 5319976 (1994-06-01), Hulsing, II
patent: 5392650 (1995-02-01), O'Brian et al.
patent: 5428995 (1995-07-01), Fersht
patent: 5428996 (1995-07-01), Abbink et al.
patent: 5557046 (1996-09-01), Hulsing, II
patent: 5703293 (1997-12-01), Zabler et al.
Pisano, Albert P., "Resonant-Structure Micromotors," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89THO249-3, Library of Congress No. 88-83988.
Tang, William C., et al, Laterally Driven Polysilicon Resonant Microstructures, Micro Electro-Mechanical Systems, Feb. 20-22, IEEE Catalog No. 89THO249-3, Library of Congress No. 88-83988.
RoyLance, L., et al., "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.
Angell, J., et al., "Silicon Micromechanical Devices," Scientific American, Apr., 1983, pp. 44-45.
Goodenough, F., "Airbags Boom When IC Accelerometer Sees 50G," Electronic Design, Aug. 8, 1991, pp. 45-56.
Allied-Signal Inc.
Moller Richard A.
Oda Christine
LandOfFree
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