Micromachined vibratory rate gyroscope

Details Micromachined vibratory rate gyroscope Micromachined vibratory rate gyroscope

1997-05-30

2000-05-30

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01C 1900

Patent

active

060678585

ABSTRACT:
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.

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