Micromachined rate and acceleration sensor

Details Micromachined rate and acceleration sensor Micromachined rate and acceleration sensor

1997-10-14

1999-10-05

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350404, G01P 344, G01P 1500

Patent

active

059627840

ABSTRACT:
A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a torsion stabilizing strut coupling a portion of the proof mass to the frame.

REFERENCES:
patent: 4879914 (1989-11-01), Norling
patent: 4939935 (1990-07-01), Amand
patent: 5005413 (1991-04-01), Novack et al.
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5319976 (1994-06-01), Hulsing, II
patent: 5331853 (1994-07-01), Hulsing, II
patent: 5331854 (1994-07-01), Hulsing, II
patent: 5341682 (1994-08-01), Hulsing, II
patent: 5456110 (1995-10-01), Hulsing, II
patent: 5501103 (1996-03-01), Woodruff et al.
patent: 5557046 (1996-09-01), Hulsing, II
patent: 5717140 (1998-02-01), Hulsing, II

Affiliated with

Also associated with

Rating

Micromachined rate and acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromachined rate and acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined rate and acceleration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1173814