Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-05-01
2007-05-01
Williams, Hezron (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
active
10497658
ABSTRACT:
The invention relates to gyroscopes having a vibrating structure that is micromachined in a silicon substrate. A novel vibrating structure is described, which has two moving masses14and14′, connected by a vibration energy coupling structure (transverse arms26, 26′, longitudinal arms22, 22′, and a short transverse link24between the longitudinal links22, 22′). The moving masses are also suspended from U-shaped flexure arms (13), having one branch end connected to the mass and another end connected to a fixed anchoring point18. The flexure arms are not inserted between the coupling structure and the mass, but are independent of the coupling structure. The masses are excited so as to vibrate in their plane by electrostatic forces applied by interdigitated combs11. The Coriolis forces make them vibrate perpendicular to the plane, and this vibration is detected by electrodes forming part of the moving masses.
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Inglese Jérôme
Lefort Pierre-Olivier
Leverrier Bertrand
Nicu Liviu
Rougeot Claude
Bellamy Tamiko
Lowe Hauptman & Berner LLP
Thales
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