Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-05-12
2000-04-04
Moller, Richard A.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
359196, G01C 1900, G02B 2608
Patent
active
060447052
ABSTRACT:
Two torsion bars project from a reference member to support at least one plate or frame-shaped first dynamic member for rotation about an axis of the torsion bars. In one embodiment, a frame-shaped first dynamic member and a second pair of torsion bars, oriented non-parallel to the first torsion bars, support a second dynamic member for rotation about an axis that is collinear with the second pair of torsion bars. The vibrational frequency of the principal torsional vibrational mode of the dynamic members are respectively lower by at least 20% than the vibrational frequency of any other vibrational mode thereof. Either an electrostatic or electromagnetic drive means imparts rotary motion to the dynamic members about the collinear torsion bar axis(es). The reference member, the torsion bars and the dynamic member(s) are all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate.
REFERENCES:
patent: 3471641 (1969-10-01), Baker et al.
patent: 3614312 (1971-10-01), Fournier et al.
patent: 3762791 (1973-10-01), Fournier et al.
patent: 4073567 (1978-02-01), Lakerveld et al.
patent: 4230393 (1980-10-01), Burke, Jr.
patent: 4317611 (1982-03-01), Petersen
patent: 4441791 (1984-04-01), Hornbeck
patent: 4468282 (1984-08-01), Neukermans
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4670092 (1987-06-01), Motamedi
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4708420 (1987-11-01), Liddiard
patent: 4710732 (1987-12-01), Hornbeck
patent: 4732440 (1988-03-01), Gadhok
patent: 4856863 (1989-08-01), Sampsell et al.
patent: 4859012 (1989-08-01), Cohn
patent: 4869107 (1989-09-01), Murakami
patent: 4942766 (1990-07-01), Greenwood et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4991964 (1991-02-01), Forgey et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5037173 (1991-08-01), Sampsell et al.
patent: 5097354 (1992-03-01), Goto
patent: 5101236 (1992-03-01), Nelson et al.
patent: 5111693 (1992-05-01), Greiff
patent: 5142303 (1992-08-01), Nelson
patent: 5155778 (1992-10-01), Magel et al.
patent: 5196714 (1993-03-01), Garcia Jr. et al.
patent: 5202785 (1993-04-01), Nelson
patent: 5203208 (1993-04-01), Bernstein
patent: 5212582 (1993-05-01), Nelson
patent: 5220835 (1993-06-01), Stephan
patent: 5231879 (1993-08-01), Yamamoto
patent: 5233456 (1993-08-01), Nelson
patent: 5247180 (1993-09-01), Mitcham et al.
patent: 5251485 (1993-10-01), Kondo
patent: 5256869 (1993-10-01), Lin et al.
patent: 5260596 (1993-11-01), Dunn et al.
patent: 5285196 (1994-02-01), Gale
patent: 5291473 (1994-03-01), Pauli
patent: 5331852 (1994-07-01), Greiff et al.
patent: 5392151 (1995-02-01), Nelson
patent: 5444566 (1995-08-01), Gale et al.
patent: 5447600 (1995-09-01), Webb
patent: 5452024 (1995-09-01), Sampsell
patent: 5454906 (1995-10-01), Baker
patent: 5457566 (1995-10-01), Sampsell
patent: 5485304 (1996-01-01), Kaeriyama
patent: 5491680 (1996-02-01), Pauli
patent: 5508841 (1996-04-01), Lin et al.
patent: 5532997 (1996-07-01), Pauli
patent: 5535047 (1996-07-01), Hornbeck
patent: 5552924 (1996-09-01), Tregilgas
patent: 5563398 (1996-10-01), Sampsell
patent: 5579148 (1996-11-01), Nishikawa et al.
patent: 5579151 (1996-11-01), Cho
patent: 5592239 (1997-01-01), Hara et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5629794 (1997-05-01), Magel et al.
patent: 5640214 (1997-06-01), Florence
patent: 5654741 (1997-08-01), Sampsell et al.
patent: 5661591 (1997-08-01), Lin et al.
patent: 5665997 (1997-09-01), Weaver
patent: 5671083 (1997-09-01), Conner et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5682174 (1997-10-01), Chiu
patent: 5696619 (1997-12-01), Knipe et al.
patent: 5754217 (1998-05-01), Allen
patent: 5771116 (1998-06-01), Miller et al.
patent: 5774604 (1998-06-01), McDonald
Boxenhorn, B., et al., "Monolithic Silicon Accelerometer," Sensors and Actuators, A21-A23 (1990) pp. 273-277.
Breng, U., et al., "Electrostatic Micormechanic Actuators," Journal of Micromechanics and Microengineering, 2 (1992) pp. 256-261.
Buser, R.A., et al., "Very High Q-factor Resonators in Monocrystalline Silicon," Sensors and Actuators, A21-A23 (1990) pp. 323-327.
Diem, B., et al., "SOI (SIMOX) as a Substrate For Surface Micromachining of Single Crystalline Silicon Sensors and Actuators," the 7th International Conference on Solid-State Sensors and Actuators, (1993) pp. 233-236.
Jaecklin, V.P., et al., "Mechanical and Optical properties of Surface Micromachined Torsional Mirrors in Silicon, Polysilicon and Aluminum", The 7th International Conference on Solid-State Sensors and Actuators, (1993) pp. 948-961.
Kleinman, R.n., et al., "Single-Crystal Silicon High-Q Torisional Oscillators, " Rev. Sci. Instrum. 56(11), Nov. 1985, pp. 2088-2091.
Pfann, W.G., et al., "Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects," Journal of Applied Physics, vol. 32, No. 10, (1961) pp. 2008-2016.
Wagner, B., et al., "Electromagnetic Microactuators with Multiple Degress of Freedom," 1991 International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers. (IEEE Cat No. 91CH2817-5) pp. 614-617.
Petersen, K., "Silicon Torsional Mirror," Proceedings of the IEEE vol. 70, No. 5 (1982), pp. 61-62.
Downing Philip
Neukermans Armand P.
Slater Timothy G.
Moller Richard A.
Schreiber Donald E.
Xros, Inc.
LandOfFree
Micromachined members coupled for relative rotation by torsion b does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined members coupled for relative rotation by torsion b, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined members coupled for relative rotation by torsion b will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-355469