Method of and an apparatus for detecting control information
Method of designing a flexure system for tuning the modal...
Method of determining a speed of rotation of an axially...
Method of making an X-Y axis dual-mass tuning fork gyroscope...
Method of operating micromachined members coupled for...
Method of simultaneously and directly generating an angular...
Method of stimulating an oscillator control for capacitive...
Methods and apparatus for a MEMS gyro sensor
Methods and systems for actively controlling movement within...
Methods and systems for controlling movement within MEMS...
Methods and systems for decelerating proof mass movements...
Methods and systems for simultaneously fabricating...
MHD sensor for measuring microradian angular rates and...
Micro angular rate sensor
Micro inertia sensor and method of manufacturing the same
Micro-beam motion sensor
Micro-electro-mechanical gyroscope having electrically...
Micro-electro-mechanical structure having electrically...
Micro-machined accelerometer with improved transfer...
Micro-machined angle-measuring gyroscope