Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2005-12-27
2005-12-27
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504160, C438S050000
Reexamination Certificate
active
06978673
ABSTRACT:
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.
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International Search Report dated Aug. 2, 2004, Application No. PCT/US2004/003727.
Arch David K.
Glenn Max C.
Johnson Burgess R.
Platt William P.
Weber Mark W.
Abeyta, Esq. Andrew
Armstrong Teasdale LLP
Chapman John E.
Honeywell International , Inc.
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