Micro-electro-mechanical gyroscope having electrically...

Details Micro-electro-mechanical gyroscope having electrically... Micro-electro-mechanical gyroscope having electrically...

2007-08-21

2007-08-21

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140, C073S504120

Reexamination Certificate

active

11317623

ABSTRACT:
An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The suspended mass is formed by an external part and an internal part, electrically separated by an electrical-insulation region having a closed annular shape. The electrical-insulation region is laterally completely surrounded by the external part and by the internal part. In one embodiment, the suspended mass has the shape of a closed frame delimiting an opening, the sensing mass is formed inside the opening and is connected to the internal part, and the mobile actuation electrodes are connected to the external part.

REFERENCES:
patent: 6044707 (2000-04-01), Kato
patent: 6134961 (2000-10-01), Touge et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6516651 (2003-02-01), Geen
patent: 6691571 (2004-02-01), Willig et al.
patent: 7051591 (2006-05-01), Chaumet et al.
patent: 11-337342 (1999-12-01), None
patent: WO98/57529 (1998-12-01), None

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