Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2005-03-01
2005-03-01
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120
Reexamination Certificate
active
06860151
ABSTRACT:
A method for reducing undesired movements of proof masses in micro-electromechanical systems (MEMS) devices is described where the proof masses are suspended above a substrate by one or more suspensions. The method includes providing an anchor on the substrate substantially between a first proof and suspensions for the first proof mass and a second proof mass and suspensions for the second proof mass, coupling a first portion of a beam to the first proof mass, coupling a second portion of the beam to the second proof mass, and attaching a third portion of the beam to the anchor, the third portion extending between the first portion and second portion of the beam, the anchor and the third portion configured to allow for rotation about an axis perpendicular to the substrate.
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International Search Report dated Aug. 2, 2004, Application No. PCT/US2004/003734, 8 pages.
Johnson Burgess R.
Platt William P.
Armstrong Teasdale LLP
Chapman John E.
Honeywell International , Inc.
Luxton, Esq. Matthew
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