Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-01-02
2007-01-02
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
active
10974760
ABSTRACT:
A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.
REFERENCES:
patent: 5450751 (1995-09-01), Putty et al.
patent: 5872313 (1999-02-01), Zarabadi et al.
patent: 5889207 (1999-03-01), Lutz
patent: 6089090 (2000-07-01), Namerikawa et al.
patent: 6276205 (2001-08-01), McNie et al.
patent: 6282958 (2001-09-01), Fell et al.
patent: 6305222 (2001-10-01), Johnson et al.
patent: 6481285 (2002-11-01), Shkel et al.
patent: 6536282 (2003-03-01), Kipp et al.
patent: 6539804 (2003-04-01), Iwata
patent: 6928873 (2005-08-01), Chen et al.
Ho Kye-Chyn
Lin Lung-Yung
Lo Yuan
Sche Schiu
Tseng Chih-Wei
Chapman John E.
Chung Shan Institute of Science and Technology
Neostones Micro Fabrication Corporation
Rabin & Berdo P.C.
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