Micro-beam motion sensor

Details Micro-beam motion sensor Micro-beam motion sensor

1997-05-05

1999-09-14

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

059525738

ABSTRACT:
A cantilevered micro-beam formed on a micro-circuit substrate such that when beam is vibrated it produces an output signal directly related to rotation of the substrate about an axis perpendicular to the beam and the direction of vibration.

REFERENCES:
patent: 5606128 (1997-02-01), Araki
patent: 5659138 (1997-08-01), Iwata
patent: 5796000 (1998-08-01), Fujiu

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